For semiconductor, FPD and industrial processes, e. g. sputtering and etching systems.
Description:
These control gate valves are available with 3-position pneumatic actuator for throttling and isolation, and with stepper motor for controlling and isolation. A valve in combination with an adaptive pressure controller PM4/5 is a pressure control system.
Nominal inside diameters (ID):
63 (2 1/2") - 400 (16")
Body material:
Stainless steel
Actuator types:
3-position pneumatic actuator (double acting), Stepper motor
Feedthrough:
Rotary feedthrough
Sealing technology:
VATLOCK-System
Sealing materials:
Bonnet: FKM (VITON®) / Gate: FKM (VITON®)
Cycles until first service:
200'000 cycles (DN400 horizontal mounting position only)
